{"id":1365,"date":"2019-05-05T00:00:00","date_gmt":"2019-05-05T00:00:00","guid":{"rendered":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55.html"},"modified":"2023-05-01T23:06:49","modified_gmt":"2023-05-01T16:06:49","slug":"hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","status":"publish","type":"post","link":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","title":{"rendered":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55"},"content":{"rendered":"
\n
<\/i>05\/05\/2019
\n<!–<\/i>59
\n<\/i>19–><\/div>\n

H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55.<\/span><\/span><\/p>\n

DESIGN AND SIMULATION ANALYSIS OF AN ELECTROSTATIC ACTUATOR FOR IMPROVING THE PERFORMANCE OF SCANNING PROBE NANOLITHOGRAPHY<\/span><\/span><\/p>\n

(Chi ti\u1ebft xem t\u1ea1i \u0111\u00e2y)<\/strong><\/span><\/span><\/span><\/a><\/p>\n

\"\"<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

05\/05\/2019 <!–59 19–> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN ELECTROSTATIC ACTUATOR FOR IMPROVING THE PERFORMANCE OF SCANNING PROBE NANOLITHOGRAPHY (Chi ti\u1ebft xem t\u1ea1i \u0111\u00e2y)<\/p>\n","protected":false},"author":4,"featured_media":1366,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[21],"tags":[],"acf":[],"yoast_head":"\nH\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4<\/title>\n<meta name=\"description\" content=\"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55\" \/>\n<meta property=\"og:locale\" content=\"vi_VN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4\" \/>\n<meta property=\"og:description\" content=\"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN\" \/>\n<meta property=\"og:url\" content=\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55\" \/>\n<meta property=\"og:site_name\" content=\"\u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/truongdaihocthanhdo\/\" \/>\n<meta property=\"article:published_time\" content=\"2019-05-05T00:00:00+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-05-01T16:06:49+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/gfxug.com\/wp-content\/uploads\/2022\/08\/tapchiKH26CN.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"377\" \/>\n\t<meta property=\"og:image:height\" content=\"545\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"khanh.dev.htecom\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"khanh.dev.htecom\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55\",\"url\":\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55\",\"name\":\"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4\",\"isPartOf\":{\"@id\":\"https:\/\/gfxug.com\/#website\"},\"datePublished\":\"2019-05-05T00:00:00+00:00\",\"dateModified\":\"2023-05-01T16:06:49+00:00\",\"author\":{\"@id\":\"https:\/\/gfxug.com\/#\/schema\/person\/01b895b9b6f2cdc79588a3c9df803758\"},\"description\":\"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN\",\"breadcrumb\":{\"@id\":\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55#breadcrumb\"},\"inLanguage\":\"vi-VN\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/gfxug.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/gfxug.com\/#website\",\"url\":\"https:\/\/gfxug.com\/\",\"name\":\"\u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4\",\"description\":\"Tr\u00ed Tu\u1ec7 - N\u0103ng L\u1ef1c - Nh\u00e2n C\u00e1ch - H\u00f2a H\u1ee3p S\u00e1ng T\u1ea1o - Chuy\u00ean Nghi\u1ec7p - Uy T\u00edn\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/gfxug.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"vi-VN\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/gfxug.com\/#\/schema\/person\/01b895b9b6f2cdc79588a3c9df803758\",\"name\":\"khanh.dev.htecom\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"vi-VN\",\"@id\":\"https:\/\/gfxug.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/b41b7ef3e4b88541cc93c0f09826f70d?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/b41b7ef3e4b88541cc93c0f09826f70d?s=96&d=mm&r=g\",\"caption\":\"khanh.dev.htecom\"}}]}<\/script>\n","yoast_head_json":{"title":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4","description":"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","og_locale":"vi_VN","og_type":"article","og_title":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4","og_description":"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN","og_url":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","og_site_name":"\u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4","article_publisher":"https:\/\/www.facebook.com\/truongdaihocthanhdo\/","article_published_time":"2019-05-05T00:00:00+00:00","article_modified_time":"2023-05-01T16:06:49+00:00","og_image":[{"width":377,"height":545,"url":"https:\/\/gfxug.com\/wp-content\/uploads\/2022\/08\/tapchiKH26CN.jpg","type":"image\/jpeg"}],"author":"khanh.dev.htecom","twitter_card":"summary_large_image","twitter_misc":{"Written by":"khanh.dev.htecom","Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","url":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55","name":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55 - \u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4","isPartOf":{"@id":"https:\/\/gfxug.com\/#website"},"datePublished":"2019-05-05T00:00:00+00:00","dateModified":"2023-05-01T16:06:49+00:00","author":{"@id":"https:\/\/gfxug.com\/#\/schema\/person\/01b895b9b6f2cdc79588a3c9df803758"},"description":"05\/05\/2019 <!--59 19--> H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55. DESIGN AND SIMULATION ANALYSIS OF AN","breadcrumb":{"@id":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55#breadcrumb"},"inLanguage":"vi-VN","potentialAction":[{"@type":"ReadAction","target":["https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/gfxug.com\/hoi-nghi-nghien-cuu-khoa-hoc-vietnam-journal-of-science-and-technology-55#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/gfxug.com\/"},{"@type":"ListItem","position":2,"name":"H\u1ed9i ngh\u1ecb nghi\u00ean c\u1ee9u khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7 Vietnam Journal of Science and Technology 55"}]},{"@type":"WebSite","@id":"https:\/\/gfxug.com\/#website","url":"https:\/\/gfxug.com\/","name":"\u0110\u1ea1i h\u1ecdc Th\u00e0nh \u0110\u00f4","description":"Tr\u00ed Tu\u1ec7 - N\u0103ng L\u1ef1c - Nh\u00e2n C\u00e1ch - H\u00f2a H\u1ee3p S\u00e1ng T\u1ea1o - Chuy\u00ean Nghi\u1ec7p - Uy T\u00edn","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/gfxug.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"vi-VN"},{"@type":"Person","@id":"https:\/\/gfxug.com\/#\/schema\/person\/01b895b9b6f2cdc79588a3c9df803758","name":"khanh.dev.htecom","image":{"@type":"ImageObject","inLanguage":"vi-VN","@id":"https:\/\/gfxug.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/b41b7ef3e4b88541cc93c0f09826f70d?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/b41b7ef3e4b88541cc93c0f09826f70d?s=96&d=mm&r=g","caption":"khanh.dev.htecom"}}]}},"_links":{"self":[{"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/posts\/1365"}],"collection":[{"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/comments?post=1365"}],"version-history":[{"count":1,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/posts\/1365\/revisions"}],"predecessor-version":[{"id":14906,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/posts\/1365\/revisions\/14906"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/media\/1366"}],"wp:attachment":[{"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/media?parent=1365"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/categories?post=1365"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/gfxug.com\/wp-json\/wp\/v2\/tags?post=1365"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}